SPUTTERING TARGET MATERIALS

PVD materials used in sputtering targetsChoosing the proper Sputtering Target Materials is as important as choosing the format. Process Materials has a wide variety  of materials including  precious and non-precious materials including pure elements, compounds and alloys in purities ranging from 99% to 99.9999% for both R&D and production of sputtering targets. 

Impurities in a sputtering target can significantly affect the quality of the deposited thin film by causing issues like poor adhesion, non-uniformity, cracks, and electrical disruptions as even small amounts of contaminant particles can be incorporated into the film, degrading its desired properties; therefore, high-purity targets are crucial for producing high-quality coatings in sputtering processes.

When choosing materials, consider the following:
Properties: The material should have the properties you need for the thin film you want to create.
Purity: Impurities in the material can affect the properties of the thin film.
Size and shape: The target’s size and shape should be based on what you’re coating and the deposition system you’re using.

Metals
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
AluminumAlxxxx99.9%-99.9999%
AntimonySbxxx99.999%
BoronBxxx99.95%
BariumBaxx99.95%
BismuthBixxx99.9%-99.999%
Carbon/GraphiteCxxxx99.999%
CadmiumCdxxx99.999%
CeriumCexx99.9%
CobaltCoxxx99.9%
ChromiumCrxxxx99.95%
CopperCuxxxx99.99%-99.999%
GalliumGax99.999%
GermaniumGexxx99.999%
HafniumHfxxx99.9%-99.99%
IronFexxx99.9%-99.99%
Indiumlnxxxx99.99%-99.999%
LanthanumLax99.9%
LeadPbxxx99.995%
MagnesiumMgxxx99.95%
ManganeseMnxxx99.9%
MolybdenumMoxxxx99.95%
NiobiumNbxxxx99.95%
NickelNixxxx99.7%-99.995%
Osmium0sx99.9%
ScandiumScx99.9%
SeleniumSexxx99.999%
SiliconSixxxx99.999%
StrontiumSrx99.5%
TinSnxxxx99.99%
TantalumTaxxxx99.95%-99.99%
TelluriumTexxx99.999%
TitaniumTixxxx99.7%-99.995%
TungstenWxxxx99.95%
VanadiumVxxx99.9%
YttriumYxxx99.9%
YtterbiumYbxxx99.9%
ZincZnxxxx99.99%-99.995%
ZirconiumZrxxxx99.7%
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Alloys
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Aluminum+CopperAl+Cuxxx99.99%
Aluminum+ChromiumAl+Crxxx99.9%-99.99%
Aluminum+SiliconAl+Sixxxx99%-99.999%
Aluminum+TitaniumAl+Tixxx99.95%
Gold+BerylliumAu+Bexxx99.99%
Gold+CopperAu+Cuxxx99.99%
Gold+GermaniumAu+Gexxx99.99%
Gold+Germanium+NickelAu+Ge+Nixxx99.99%
Gold+Germanium+AntimonyAu+Ge+Sbxxx99.99%
Cobalt+NickelCo+Nixxx99.95%
Gold+NickelAu+Nixxx99.99%
Chromium+SiliconCr+Sixxx99.95%
CIGSCu(InGa)Se
2
xxxx99.99%
Copper+GalliumCu+Gaxxxx99.99%
Copper+IndiumCu+Inxxxx99.99%
Copper+NickelCu+Nixxx99.99%
Copper+SeleniumCu+Sexxx99.99%
Copper+ZincCu+Znxxx99.99%
Copper+Indium+SeleniumCulnSe
2
xxx99.99%
Iron+HafniumFe+Hfxxx99.9%
Iron+NickelFe+Nixxx99.9%
Germanium+AntimonyGe+Sbxxx99.9%
Germanium+Antimony+TelluriumGe+Sb+Texxx99.9%
Germanium+TelluriumGe+Texxx99.9%
Indium+TinIn+Snxxx99.99%
Indium+SeleniumIn
2
Se
3
xxx99.99%
Nickel+ChromiumNi+Crxxxx99.99%
Nickel+PlatinumNi+Ptxxx99.95%
Nickel+VanadiumNi+Vxxx99.95%
Palladium+SilverPd+Agxxx99.9%
Silicon+Antimony+TelluriumSi+Sb+Texxx99.99%
Titanium+AluminumTi+Alxxxx99.9%
Titanium+ChromiumTi+Crxxx99.5%-99.99%
Titanium+CopperTi+Cuxxx99.5% -99.95%
Titanium+NickelTi+Nixxx99.9%
Titanium+SiliconTi+Sixxx99.9%
Titanium+ZirconiumTI+Zrxxx99.95%
Tungsten+TitaniumW+Tixxx99.5%-99.9%
Yttrium Barium Copper OxideYBCOxxx99.9%
Zinc+AluminumZn+Alxxx99.99%
Zinc+SeleniumZn+Sexxx99.99%
Zinc+TinZn+Snxxxx99.99%
Zirconium+AluminumZr+Alxxx99.9%
Zirconium+HafniumZr+Hfxxx99.9% -99.95%
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Precious Metals
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
GoldAuxxx99.99%-99.999%
IridiumIrxxx99.9%
PalladiumPdxxx99.95%
PlatinumPtxxx99.99%
RheniumRexxx99.9%
RutheniumRuxxx99.9%
RhodiumRhxxx99.9%
SilverAgxxxx99.99%-99.999%
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Borides
MaterialCompositionSputtering TargetCylindrical TargetE-beamEvaporationTypical Purity
Aluminum BorideAlB
2
xxx99%
Chromium BorideCrB
2
xxx99.5%
Hafnium BorideHfB
2
xxx99.5%
Lanthanum BorideLaB
6
xxx99.5%
Molybdenum BorideMo
2
B
5
, MoB
2
xxx99.5%
Niobium BorideNbB
2
xxx99.5%
Tantalum BorideTaB
2
xxx99.5%
Titanium BorideTiB
2
xxx99.5%
Tungsten BorideWB, W
2
B
xxx99.5%
Vanadium BorideVB
2
xxx99.5%
Zirconium BorideZrB
2
xxx99.5%
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Carbides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Boron CarbideB
4
C
xxx99.5%
Chromium CarbideCr
3
C
2
xxx99.5%
Hafnium CarbideHfCxxx99.5%
Molybdenum CarbideMoCxxx99.5%
Niobium CarbideNbCxxx99.5%
Silicon CarbideSiCxxx99.5%
Tantalum CarbideTaCxxx99.5%
Titanium CarbideTiCxxx99.5%
Tungsten CarbideWCxxx99.5%
Vanadium CarbideVCxxx99.5%
Zirconium CarbideZrCxxx99.5%
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Fluorides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Aluminum FluorideAlF
3
xxx99.5%
Barium FluorideBaF
2
xxx99.9%
Calcium FluorideCaF
2
xxx99.9%
Lanthanum FluorideLaF
3
xxx99.9%
Lead FluoridePbF
2
xxx99.9%
Magnesium FluorideMgF
2
xxx99.9%
Sodium FluorideNaFxxx99.9%
Strontium FluorideSrF
2
xxx99.9%
Thorium FluorideThF
4
xxx99.9%
Yttrium FluorideYF
3
xxx99%
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Nitrides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Aluminum NitrideAlNxxx99.5%
Boron NitrideBNxxx99.5%
Hafnium NitrideHfNxxx99.5%
Silicon NitrideSi
3
N
4

xxx99.9%
Tantalum NitrideTaNxxx99.5%
Titanium NitrideTiNxxx99.5%
Vanadium NitrideVNxxx99.5%
Zirconium NitrideZrNxxx99.5%
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Oxides
MaterialCompositionSputtering TargetCylindrical TargetsE-BeamEvaporationTypical Purity
Aluminum OxideAl
2
O
3
xxx99.99%
Antimony OxideSb
2
O
3
xxx99.99%
Barium TitanateBaTiO
3
xxx99.9%
Beryllium OxideBeOxxx99.5%
Bismuth OxideBi
2
O
3
xxx99.9%
Bismuth TitanateBi
4
TiO
3
xxx99.9%
Cerium OxideCeO
2
xxx99.99%
Chromium OxideCr
2
O
3
xxx99.9%
Gallium OxideGa
2
O
3
xxx99.999%
Germanium OxideGeO
2
xxx99.999%
Hafnium OxideHfO
2
xxx99.9%
Indium OxideIn
2
O
3
xxx99.99%
Indium Tin Oxide(In
2
O
3
)90, (SnO
2
)10
xxx99.99%
Iron OxideFe
2
O
3
, Fe
2
O
4
xxx99.5%- 99.9%
Lead TitanatePbTiO
3
xxx99.9%
Magnesium OxideMgOxxx99.95%
Manganese OxideMnO, MnO
2
, Mn
2
O
3
xxx99.9%
Molybdenum OxideMoO
2
, MoO
3
xxx99.9%
Neodymium OxideNd
2
O
3
xxx99.9%
Nickel OxideNiOxxx99.9%
Niobium OxideNb
2
O
5
xxx99.95%
Praseodymium OxidePr
2
O
3
xxx99.9%
Samarium OxideSm
2
O
3
xxx99.9%
Silicon DioxideSiO
2
xxx99.995%
Silicon MonoxideSiOxxx99.9%
Strontium OxideSrOxxx99.5%
Strontium TitanateSrTiO
3
xxx99.9%
Tantalum OxideTa
2
O
5
xxx99.9%
Tin OxideSnO
2
xxx99.9%
Titanium OxideTiO
2
, Ti
2
O
3
xxx99.9%
Tungsten OxideWO
3
xxx99.9%
Yttrium OxideY
2
O
3
xxx99.9%
Zinc OxideZnOxxx99.99%
Zirconium OxideZrO
2
xxx99.9%
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Selenides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Cadmium SelenideCdSexxx99.995%
Lead SelenidePbSexxx99.95%
Molybdenum SelenideMoSe
2
xxx99.9%
Niobium SelenideNbSe
2
xxx99.8%
Tantalum SelenideTaSexxx99.4%
Tungsten SelenideWSe
2
xxx99.8%
Zinc SelenideZnSexxx99.9%
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Silicides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Chromium SilicideCrSi
2
, Cr
3
Si
xxx99.5%
Cobalt SilicideCiSi
2
xxx99.5%
Hafnium SilicideHfSi
2
xxx99.5%
Iron SilicideFeSi
2
xxx99.5%
Molybdenum SilicideMoSi
2
xxx99.5%
Niobium SilicideNbSi
2
xxx99.5%
Tantalum SilicideTaSi
2
, TaSi
3
xxx99.5%
Titanium SilicideTi
5
Si
2
, TaSi
3
xxx99.9%
Tungsten SilicideWSi
2
xxx99.9%
Vanadium SilicideVSi
2
, V
3
Si
xxx99.5%
Zirconium SilicideZrSi 2
2
xxx99.5%
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Sulfides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Cadmium SulfideCdSxxx99.99%
Indium sulfideIn
2
S
3
xxx99.99%
Lead SulfidePbSxxx99.9%
Molybdenum SulfideMoS
2
xxx99%
Tantalum SulfideTaS
2
xxx99.9%
Tungsten SulfideWS
2
xxx99.8%
Zinc SulfideZnSxxx99.99%
Zirconium SulfideZrS
2
xxx99.9%
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Tellurides
MaterialCompositionSputtering TargetCylindrical TargetE-BeamEvaporationTypical Purity
Cadmium TellurideCdTexxx99.99%
Lead TelluridePbTexxx99.99%
Molybdenum TellurideMoTe
2
xxx99.9%
Niobium TellurideNbTe
2
xxx99.8%
Tantalum TellurideTaTe
2
xxx99.8%
Tungsten TellurideWTe
2
xxx99.8%
Zinc TellurideZnTexxx99.99%
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