SPUTTERING TARGET MATERIALS
Choosing the proper Sputtering Target Materials is as important as choosing the format. Process Materials has a wide variety of materials including precious and non-precious materials including pure elements, compounds and alloys in purities ranging from 99% to 99.9999% for both R&D and production of sputtering targets.
Impurities in a sputtering target can significantly affect the quality of the deposited thin film by causing issues like poor adhesion, non-uniformity, cracks, and electrical disruptions as even small amounts of contaminant particles can be incorporated into the film, degrading its desired properties; therefore, high-purity targets are crucial for producing high-quality coatings in sputtering processes.
When choosing materials, consider the following:
Properties: The material should have the properties you need for the thin film you want to create.
Purity: Impurities in the material can affect the properties of the thin film.
Size and shape: The target’s size and shape should be based on what you’re coating and the deposition system you’re using.
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum | Al | x | x | x | x | 99.9%-99.9999% |
| Antimony | Sb | x | x | x | 99.999% | |
| Boron | B | x | x | x | 99.95% | |
| Barium | Ba | x | x | 99.95% | ||
| Bismuth | Bi | x | x | x | 99.9%-99.999% | |
| Carbon/Graphite | C | x | x | x | x | 99.999% |
| Cadmium | Cd | x | x | x | 99.999% | |
| Cerium | Ce | x | x | 99.9% | ||
| Cobalt | Co | x | x | x | 99.9% | |
| Chromium | Cr | x | x | x | x | 99.95% |
| Copper | Cu | x | x | x | x | 99.99%-99.999% |
| Gallium | Ga | x | 99.999% | |||
| Germanium | Ge | x | x | x | 99.999% | |
| Hafnium | Hf | x | x | x | 99.9%-99.99% | |
| Iron | Fe | x | x | x | 99.9%-99.99% | |
| Indium | ln | x | x | x | x | 99.99%-99.999% |
| Lanthanum | La | x | 99.9% | |||
| Lead | Pb | x | x | x | 99.995% | |
| Magnesium | Mg | x | x | x | 99.95% | |
| Manganese | Mn | x | x | x | 99.9% | |
| Molybdenum | Mo | x | x | x | x | 99.95% |
| Niobium | Nb | x | x | x | x | 99.95% |
| Nickel | Ni | x | x | x | x | 99.7%-99.995% |
| Osmium | 0s | x | 99.9% | |||
| Scandium | Sc | x | 99.9% | |||
| Selenium | Se | x | x | x | 99.999% | |
| Silicon | Si | x | x | x | x | 99.999% |
| Strontium | Sr | x | 99.5% | |||
| Tin | Sn | x | x | x | x | 99.99% |
| Tantalum | Ta | x | x | x | x | 99.95%-99.99% |
| Tellurium | Te | x | x | x | 99.999% | |
| Titanium | Ti | x | x | x | x | 99.7%-99.995% |
| Tungsten | W | x | x | x | x | 99.95% |
| Vanadium | V | x | x | x | 99.9% | |
| Yttrium | Y | x | x | x | 99.9% | |
| Ytterbium | Yb | x | x | x | 99.9% | |
| Zinc | Zn | x | x | x | x | 99.99%-99.995% |
| Zirconium | Zr | x | x | x | x | 99.7% |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum+Copper | Al+Cu | x | x | x | 99.99% | |
| Aluminum+Chromium | Al+Cr | x | x | x | 99.9%-99.99% | |
| Aluminum+Silicon | Al+Si | x | x | x | x | 99%-99.999% |
| Aluminum+Titanium | Al+Ti | x | x | x | 99.95% | |
| Gold+Beryllium | Au+Be | x | x | x | 99.99% | |
| Gold+Copper | Au+Cu | x | x | x | 99.99% | |
| Gold+Germanium | Au+Ge | x | x | x | 99.99% | |
| Gold+Germanium+Nickel | Au+Ge+Ni | x | x | x | 99.99% | |
| Gold+Germanium+Antimony | Au+Ge+Sb | x | x | x | 99.99% | |
| Cobalt+Nickel | Co+Ni | x | x | x | 99.95% | |
| Gold+Nickel | Au+Ni | x | x | x | 99.99% | |
| Chromium+Silicon | Cr+Si | x | x | x | 99.95% | |
| CIGS | Cu(InGa)Se 2 | x | x | x | x | 99.99% |
| Copper+Gallium | Cu+Ga | x | x | x | x | 99.99% |
| Copper+Indium | Cu+In | x | x | x | x | 99.99% |
| Copper+Nickel | Cu+Ni | x | x | x | 99.99% | |
| Copper+Selenium | Cu+Se | x | x | x | 99.99% | |
| Copper+Zinc | Cu+Zn | x | x | x | 99.99% | |
| Copper+Indium+Selenium | CulnSe 2 | x | x | x | 99.99% | |
| Iron+Hafnium | Fe+Hf | x | x | x | 99.9% | |
| Iron+Nickel | Fe+Ni | x | x | x | 99.9% | |
| Germanium+Antimony | Ge+Sb | x | x | x | 99.9% | |
| Germanium+Antimony+Tellurium | Ge+Sb+Te | x | x | x | 99.9% | |
| Germanium+Tellurium | Ge+Te | x | x | x | 99.9% | |
| Indium+Tin | In+Sn | x | x | x | 99.99% | |
| Indium+Selenium | In 2Se 3 | x | x | x | 99.99% | |
| Nickel+Chromium | Ni+Cr | x | x | x | x | 99.99% |
| Nickel+Platinum | Ni+Pt | x | x | x | 99.95% | |
| Nickel+Vanadium | Ni+V | x | x | x | 99.95% | |
| Palladium+Silver | Pd+Ag | x | x | x | 99.9% | |
| Silicon+Antimony+Tellurium | Si+Sb+Te | x | x | x | 99.99% | |
| Titanium+Aluminum | Ti+Al | x | x | x | x | 99.9% |
| Titanium+Chromium | Ti+Cr | x | x | x | 99.5%-99.99% | |
| Titanium+Copper | Ti+Cu | x | x | x | 99.5% -99.95% | |
| Titanium+Nickel | Ti+Ni | x | x | x | 99.9% | |
| Titanium+Silicon | Ti+Si | x | x | x | 99.9% | |
| Titanium+Zirconium | TI+Zr | x | x | x | 99.95% | |
| Tungsten+Titanium | W+Ti | x | x | x | 99.5%-99.9% | |
| Yttrium Barium Copper Oxide | YBCO | x | x | x | 99.9% | |
| Zinc+Aluminum | Zn+Al | x | x | x | 99.99% | |
| Zinc+Selenium | Zn+Se | x | x | x | 99.99% | |
| Zinc+Tin | Zn+Sn | x | x | x | x | 99.99% |
| Zirconium+Aluminum | Zr+Al | x | x | x | 99.9% | |
| Zirconium+Hafnium | Zr+Hf | x | x | x | 99.9% -99.95% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Gold | Au | x | x | x | 99.99%-99.999% | |
| Iridium | Ir | x | x | x | 99.9% | |
| Palladium | Pd | x | x | x | 99.95% | |
| Platinum | Pt | x | x | x | 99.99% | |
| Rhenium | Re | x | x | x | 99.9% | |
| Ruthenium | Ru | x | x | x | 99.9% | |
| Rhodium | Rh | x | x | x | 99.9% | |
| Silver | Ag | x | x | x | x | 99.99%-99.999% |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum Boride | AlB 2 | x | x | x | 99% | |
| Chromium Boride | CrB 2 | x | x | x | 99.5% | |
| Hafnium Boride | HfB 2 | x | x | x | 99.5% | |
| Lanthanum Boride | LaB 6 | x | x | x | 99.5% | |
| Molybdenum Boride | Mo 2B 5, MoB 2 | x | x | x | 99.5% | |
| Niobium Boride | NbB 2 | x | x | x | 99.5% | |
| Tantalum Boride | TaB 2 | x | x | x | 99.5% | |
| Titanium Boride | TiB 2 | x | x | x | 99.5% | |
| Tungsten Boride | WB, W 2B | x | x | x | 99.5% | |
| Vanadium Boride | VB 2 | x | x | x | 99.5% | |
| Zirconium Boride | ZrB 2 | x | x | x | 99.5% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Boron Carbide | B 4C | x | x | x | 99.5% | |
| Chromium Carbide | Cr 3C 2 | x | x | x | 99.5% | |
| Hafnium Carbide | HfC | x | x | x | 99.5% | |
| Molybdenum Carbide | MoC | x | x | x | 99.5% | |
| Niobium Carbide | NbC | x | x | x | 99.5% | |
| Silicon Carbide | SiC | x | x | x | 99.5% | |
| Tantalum Carbide | TaC | x | x | x | 99.5% | |
| Titanium Carbide | TiC | x | x | x | 99.5% | |
| Tungsten Carbide | WC | x | x | x | 99.5% | |
| Vanadium Carbide | VC | x | x | x | 99.5% | |
| Zirconium Carbide | ZrC | x | x | x | 99.5% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum Fluoride | AlF 3 | x | x | x | 99.5% | |
| Barium Fluoride | BaF 2 | x | x | x | 99.9% | |
| Calcium Fluoride | CaF 2 | x | x | x | 99.9% | |
| Lanthanum Fluoride | LaF 3 | x | x | x | 99.9% | |
| Lead Fluoride | PbF 2 | x | x | x | 99.9% | |
| Magnesium Fluoride | MgF 2 | x | x | x | 99.9% | |
| Sodium Fluoride | NaF | x | x | x | 99.9% | |
| Strontium Fluoride | SrF 2 | x | x | x | 99.9% | |
| Thorium Fluoride | ThF 4 | x | x | x | 99.9% | |
| Yttrium Fluoride | YF 3 | x | x | x | 99% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum Nitride | AlN | x | x | x | 99.5% | |
| Boron Nitride | BN | x | x | x | 99.5% | |
| Hafnium Nitride | HfN | x | x | x | 99.5% | |
| Silicon Nitride | Si 3N 4 | x | x | x | 99.9% | |
| Tantalum Nitride | TaN | x | x | x | 99.5% | |
| Titanium Nitride | TiN | x | x | x | 99.5% | |
| Vanadium Nitride | VN | x | x | x | 99.5% | |
| Zirconium Nitride | ZrN | x | x | x | 99.5% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Targets | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Aluminum Oxide | Al 2O 3 | x | x | x | 99.99% | |
| Antimony Oxide | Sb 2O 3 | x | x | x | 99.99% | |
| Barium Titanate | BaTiO 3 | x | x | x | 99.9% | |
| Beryllium Oxide | BeO | x | x | x | 99.5% | |
| Bismuth Oxide | Bi 2O 3 | x | x | x | 99.9% | |
| Bismuth Titanate | Bi 4TiO 3 | x | x | x | 99.9% | |
| Cerium Oxide | CeO 2 | x | x | x | 99.99% | |
| Chromium Oxide | Cr 2O 3 | x | x | x | 99.9% | |
| Gallium Oxide | Ga 2O 3 | x | x | x | 99.999% | |
| Germanium Oxide | GeO 2 | x | x | x | 99.999% | |
| Hafnium Oxide | HfO 2 | x | x | x | 99.9% | |
| Indium Oxide | In 2O 3 | x | x | x | 99.99% | |
| Indium Tin Oxide | (In 2O 3)90, (SnO 2)10 | x | x | x | 99.99% | |
| Iron Oxide | Fe 2O 3, Fe 2O 4 | x | x | x | 99.5%- 99.9% | |
| Lead Titanate | PbTiO 3 | x | x | x | 99.9% | |
| Magnesium Oxide | MgO | x | x | x | 99.95% | |
| Manganese Oxide | MnO, MnO 2, Mn 2O 3 | x | x | x | 99.9% | |
| Molybdenum Oxide | MoO 2, MoO 3 | x | x | x | 99.9% | |
| Neodymium Oxide | Nd 2O 3 | x | x | x | 99.9% | |
| Nickel Oxide | NiO | x | x | x | 99.9% | |
| Niobium Oxide | Nb 2O 5 | x | x | x | 99.95% | |
| Praseodymium Oxide | Pr 2O 3 | x | x | x | 99.9% | |
| Samarium Oxide | Sm 2O 3 | x | x | x | 99.9% | |
| Silicon Dioxide | SiO 2 | x | x | x | 99.995% | |
| Silicon Monoxide | SiO | x | x | x | 99.9% | |
| Strontium Oxide | SrO | x | x | x | 99.5% | |
| Strontium Titanate | SrTiO 3 | x | x | x | 99.9% | |
| Tantalum Oxide | Ta 2O 5 | x | x | x | 99.9% | |
| Tin Oxide | SnO 2 | x | x | x | 99.9% | |
| Titanium Oxide | TiO 2, Ti 2O 3 | x | x | x | 99.9% | |
| Tungsten Oxide | WO 3 | x | x | x | 99.9% | |
| Yttrium Oxide | Y 2O 3 | x | x | x | 99.9% | |
| Zinc Oxide | ZnO | x | x | x | 99.99% | |
| Zirconium Oxide | ZrO 2 | x | x | x | 99.9% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Cadmium Selenide | CdSe | x | x | x | 99.995% | |
| Lead Selenide | PbSe | x | x | x | 99.95% | |
| Molybdenum Selenide | MoSe 2 | x | x | x | 99.9% | |
| Niobium Selenide | NbSe 2 | x | x | x | 99.8% | |
| Tantalum Selenide | TaSe | x | x | x | 99.4% | |
| Tungsten Selenide | WSe 2 | x | x | x | 99.8% | |
| Zinc Selenide | ZnSe | x | x | x | 99.9% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Chromium Silicide | CrSi 2, Cr 3Si | x | x | x | 99.5% | |
| Cobalt Silicide | CiSi 2 | x | x | x | 99.5% | |
| Hafnium Silicide | HfSi 2 | x | x | x | 99.5% | |
| Iron Silicide | FeSi 2 | x | x | x | 99.5% | |
| Molybdenum Silicide | MoSi 2 | x | x | x | 99.5% | |
| Niobium Silicide | NbSi 2 | x | x | x | 99.5% | |
| Tantalum Silicide | TaSi 2, TaSi 3 | x | x | x | 99.5% | |
| Titanium Silicide | Ti 5Si 2, TaSi 3 | x | x | x | 99.9% | |
| Tungsten Silicide | WSi 2 | x | x | x | 99.9% | |
| Vanadium Silicide | VSi 2 , V 3Si | x | x | x | 99.5% | |
| Zirconium Silicide | ZrSi 2 2 | x | x | x | 99.5% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Cadmium Sulfide | CdS | x | x | x | 99.99% | |
| Indium sulfide | In 2S 3 | x | x | x | 99.99% | |
| Lead Sulfide | PbS | x | x | x | 99.9% | |
| Molybdenum Sulfide | MoS 2 | x | x | x | 99% | |
| Tantalum Sulfide | TaS 2 | x | x | x | 99.9% | |
| Tungsten Sulfide | WS 2 | x | x | x | 99.8% | |
| Zinc Sulfide | ZnS | x | x | x | 99.99% | |
| Zirconium Sulfide | ZrS 2 | x | x | x | 99.9% | |
| REQUEST FOR QUOTE | ||||||
| Material | Composition | Sputtering Target | Cylindrical Target | E-Beam | Evaporation | Typical Purity |
|---|---|---|---|---|---|---|
| Cadmium Telluride | CdTe | x | x | x | 99.99% | |
| Lead Telluride | PbTe | x | x | x | 99.99% | |
| Molybdenum Telluride | MoTe 2 | x | x | x | 99.9% | |
| Niobium Telluride | NbTe 2 | x | x | x | 99.8% | |
| Tantalum Telluride | TaTe 2 | x | x | x | 99.8% | |
| Tungsten Telluride | WTe 2 | x | x | x | 99.8% | |
| Zinc Telluride | ZnTe | x | x | x | 99.99% | |
| REQUEST FOR QUOTE | ||||||
