SI SPUTTER TARGET
PRODUCTION METHODOLOGY
The target material is thermally sprayed and receives a surface finish. An adhesion-promoting layer is present on the stainless steel backing tube (SS 304). After quality control, the targets are wrapped in protective paper or foam, packed with silica gel in PVC bags and fixed in wooden crates for shipping.
ANALYTICAL METHODS
ICP/AAS analyzes chemical composition
ICP analyzes impurity levels
O/N element analyzer measures O/N levels
Balance with water vessel measures density
Metallographic analyzes microscopy
SURFACE FINISH AND APPEARANCE AT SHIPMENT
No cracks visible to the naked eye
Visible inclusions and/or hole (<0.1mm = acceptable; 0.1-0.5 = 5 in a 10mm annular ring; >0.5mm = unacceptable)
