{"id":715,"date":"2018-07-19T17:10:39","date_gmt":"2018-07-19T17:10:39","guid":{"rendered":"http:\/\/processmaterials.com\/?page_id=715"},"modified":"2024-12-30T21:57:19","modified_gmt":"2024-12-30T21:57:19","slug":"sputtering-target-materials","status":"publish","type":"page","link":"https:\/\/processmaterials.com\/sputtering-target-materials\/","title":{"rendered":"Sputtering Target Materials"},"content":{"rendered":"

[vc_row][vc_column][vc_custom_heading text=”SPUTTERING TARGET MATERIALS” font_container=”tag:h1|text_align:center” google_fonts=”font_family:Open%20Sans%3A300%2C300italic%2Cregular%2Citalic%2C600%2C600italic%2C700%2C700italic%2C800%2C800italic|font_style:400%20regular%3A400%3Anormal” css=””][vc_separator color=”black” border_width=”5″ el_width=”10″][vc_column_text css=””]\"PVDChoosing the proper Sputtering Target Materials is as important as choosing the format<\/a>. <\/span>Process Materials has a wide variety\u00a0 of materials including\u00a0 precious and non-precious <\/span>materials including pure elements<\/a>, compounds and alloys in\u00a0<\/span>purities ranging from 99% to 99.9999% for both R&D and\u00a0<\/span>production of sputtering targets.\u00a0<\/span><\/p>\n

Impurities in a sputtering target can significantly affect the quality of the deposited thin film by causing issues like poor adhesion, non-uniformity, cracks, and electrical disruptions as even small amounts of contaminant particles can be incorporated into the film, degrading its desired properties;\u00a0<\/span>therefore, high-purity targets are crucial for producing high-quality coatings in sputtering processes.<\/span>
\n<\/span>
\nWhen choosing materials, consider the following:
\nProperties<\/strong>: The material should have the properties you need for the thin film you want to create.
\nPurity<\/strong>: Impurities in the material can affect the properties of the thin film.
\nSize and shape<\/strong>:\u00a0<\/span>The target’s size and shape should be based on what you’re coating and the deposition system you’re using.<\/span>[\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row][vc_column]

Metals<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum<\/td>Al<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.9%-99.9999%<\/td>\n<\/tr>\n
Antimony<\/td>Sb <\/td>x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Boron<\/td>B<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Barium<\/td>Ba<\/td>x<\/td><\/td><\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Bismuth<\/td>Bi<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%-99.999%<\/td>\n<\/tr>\n
Carbon\/Graphite<\/td>C<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Cadmium<\/td>Cd<\/td>x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Cerium<\/td>Ce<\/td>x<\/td><\/td><\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Cobalt<\/td>Co<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Chromium<\/td>Cr<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Copper<\/td>Cu<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%-99.999%<\/td>\n<\/tr>\n
Gallium<\/td>Ga<\/td><\/td><\/td><\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Germanium<\/td>Ge<\/td>x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Hafnium<\/td>Hf<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%-99.99%<\/td>\n<\/tr>\n
Iron<\/td>Fe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%-99.99%<\/td>\n<\/tr>\n
Indium<\/td>ln<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%-99.999%<\/td>\n<\/tr>\n
Lanthanum<\/td>La<\/td><\/td><\/td><\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Lead<\/td>Pb<\/td>x<\/td><\/td>x<\/td>x<\/td>99.995%<\/td>\n<\/tr>\n
Magnesium<\/td>Mg<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Manganese<\/td>Mn<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Molybdenum<\/td>Mo<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Niobium<\/td>Nb<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Nickel<\/td>Ni<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.7%-99.995%<\/td>\n<\/tr>\n
Osmium<\/td>0s<\/td><\/td><\/td><\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Scandium<\/td>Sc<\/td><\/td><\/td><\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Selenium<\/td>Se<\/td>x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Silicon<\/td>Si<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Strontium<\/td>Sr<\/td><\/td><\/td><\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tin<\/td>Sn<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Tantalum<\/td>Ta<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.95%-99.99%<\/td>\n<\/tr>\n
Tellurium<\/td>Te<\/td>x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Titanium<\/td>Ti<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.7%-99.995%<\/td>\n<\/tr>\n
Tungsten<\/td>W<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Vanadium<\/td>V<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Yttrium<\/td>Y<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Ytterbium<\/td>Yb<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Zinc<\/td>Zn<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%-99.995%<\/td>\n<\/tr>\n
Zirconium<\/td>Zr<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.7%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Alloys<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum+Copper<\/td>Al+Cu<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Aluminum+Chromium<\/td>Al+Cr<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%-99.99%<\/td>\n<\/tr>\n
Aluminum+Silicon<\/td>Al+Si<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99%-99.999%<\/td>\n<\/tr>\n
Aluminum+Titanium<\/td>Al+Ti<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Gold+Beryllium<\/td>Au+Be<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Gold+Copper<\/td>Au+Cu<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Gold+Germanium<\/td>Au+Ge<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Gold+Germanium+Nickel<\/td>Au+Ge+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Gold+Germanium+Antimony<\/td>Au+Ge+Sb<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Cobalt+Nickel<\/td>Co+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Gold+Nickel<\/td>Au+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Chromium+Silicon<\/td>Cr+Si<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
CIGS<\/td>Cu(InGa)Se<\/sup>
2<\/sub><\/span><\/td>		x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Gallium<\/td>Cu+Ga<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Indium<\/td>Cu+In<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Nickel<\/td>Cu+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Selenium<\/td>Cu+Se<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Zinc<\/td>Cu+Zn<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Copper+Indium+Selenium<\/td>CulnSe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Iron+Hafnium<\/td>Fe+Hf<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Iron+Nickel<\/td>Fe+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Germanium+Antimony<\/td>Ge+Sb<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Germanium+Antimony+Tellurium<\/td>Ge+Sb+Te<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Germanium+Tellurium<\/td>Ge+Te<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Indium+Tin<\/td>In+Sn<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Indium+Selenium<\/td>In<\/sup>
2<\/sub><\/span>Se<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Nickel+Chromium<\/td>Ni+Cr<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Nickel+Platinum<\/td>Ni+Pt<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Nickel+Vanadium<\/td>Ni+V<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Palladium+Silver<\/td>Pd+Ag<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Silicon+Antimony+Tellurium<\/td>Si+Sb+Te<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Titanium+Aluminum<\/td>Ti+Al<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Titanium+Chromium<\/td>Ti+Cr<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%-99.99%<\/td>\n<\/tr>\n
Titanium+Copper<\/td>Ti+Cu<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5% -99.95%<\/td>\n<\/tr>\n
Titanium+Nickel<\/td>Ti+Ni<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Titanium+Silicon<\/td>Ti+Si<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Titanium+Zirconium<\/td>TI+Zr<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Tungsten+Titanium<\/td>W+Ti<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%-99.9%<\/td>\n<\/tr>\n
Yttrium Barium Copper Oxide<\/td>YBCO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Zinc+Aluminum<\/td>Zn+Al<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Zinc+Selenium<\/td>Zn+Se<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Zinc+Tin<\/td>Zn+Sn<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Zirconium+Aluminum<\/td>Zr+Al<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Zirconium+Hafnium<\/td>Zr+Hf<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9% -99.95%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Precious Metals<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Gold<\/td>Au<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%-99.999%<\/td>\n<\/tr>\n
Iridium <\/td>Ir<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Palladium<\/td>Pd<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Platinum<\/td>Pt<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Rhenium<\/td>Re<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Ruthenium <\/td>Ru<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Rhodium<\/td>Rh<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Silver<\/td>Ag<\/td>x<\/td>x<\/td>x<\/td>x<\/td>99.99%-99.999%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Borides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum Boride<\/td>AlB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99%<\/td>\n<\/tr>\n
Chromium Boride<\/td>CrB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Hafnium Boride<\/td>HfB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Lanthanum Boride<\/td>LaB<\/sup>
6<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Molybdenum Boride<\/td>Mo<\/sup>
2<\/sub><\/span>B<\/sup>
5<\/sub><\/span>, MoB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Niobium Boride<\/td>NbB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tantalum Boride<\/td>TaB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Titanium Boride<\/td>TiB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tungsten Boride<\/td>WB, W<\/sup>
2<\/sub><\/span>B<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Vanadium Boride<\/td>VB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Zirconium Boride<\/td>ZrB<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Carbides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Boron Carbide<\/td>B<\/sup>
4<\/sub><\/span>C<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Chromium Carbide<\/td>Cr<\/sup>
3<\/sub><\/span>C<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Hafnium Carbide<\/td>HfC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Molybdenum Carbide<\/td>MoC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Niobium Carbide<\/td>NbC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Silicon Carbide<\/td>SiC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tantalum Carbide<\/td>TaC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Titanium Carbide<\/td>TiC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tungsten Carbide<\/td>WC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Vanadium Carbide<\/td>VC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Zirconium Carbide<\/td>ZrC<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Fluorides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum Fluoride<\/td>AlF<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Barium Fluoride<\/td>BaF<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Calcium Fluoride<\/td>CaF<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Lanthanum Fluoride<\/td>LaF<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Lead Fluoride<\/td>PbF<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Magnesium Fluoride<\/td>MgF<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Sodium Fluoride<\/td>NaF<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Strontium Fluoride<\/td>SrF<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Thorium Fluoride<\/td>ThF<\/sup>
4<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Yttrium Fluoride<\/td>YF<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a> <\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Nitrides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum Nitride<\/td>AlN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Boron Nitride<\/td>BN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Hafnium Nitride<\/td>HfN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Silicon Nitride<\/td>Si<\/sup>
3<\/sub><\/span>N<\/sup>
4<\/sub><\/span>
\n<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tantalum Nitride<\/td>TaN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Titanium Nitride<\/td>TiN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Vanadium Nitride<\/td>VN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Zirconium Nitride<\/td>ZrN<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Oxides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Targets<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Aluminum Oxide<\/td>Al<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Antimony Oxide<\/td>Sb<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Barium Titanate<\/td>BaTiO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Beryllium Oxide<\/td>BeO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Bismuth Oxide<\/td>Bi<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Bismuth Titanate<\/td>Bi<\/sup>
4<\/sub><\/span>TiO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Cerium Oxide<\/td>CeO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Chromium Oxide<\/td>Cr<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Gallium Oxide<\/td>Ga<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Germanium Oxide<\/td>GeO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.999%<\/td>\n<\/tr>\n
Hafnium Oxide<\/td>HfO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Indium Oxide<\/td>In<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Indium Tin Oxide<\/td>(In<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span>)90, (SnO<\/sup>
2<\/sub><\/span>)10<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Iron Oxide<\/td>Fe<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span>, Fe<\/sup>
2<\/sub><\/span>O<\/sup>
4<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%- 99.9%<\/td>\n<\/tr>\n
Lead Titanate<\/td>PbTiO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Magnesium Oxide<\/td>MgO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Manganese Oxide<\/td>MnO, MnO<\/sup>
2<\/sub><\/span>, Mn<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Molybdenum Oxide<\/td>MoO<\/sup>
2<\/sub><\/span>, MoO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Neodymium Oxide<\/td>Nd<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Nickel Oxide<\/td>NiO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Niobium Oxide<\/td>Nb<\/sup>
2<\/sub><\/span>O<\/sup>
5<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Praseodymium Oxide<\/td>Pr<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Samarium Oxide<\/td>Sm<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Silicon Dioxide<\/td>SiO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.995%<\/td>\n<\/tr>\n
Silicon Monoxide<\/td>SiO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Strontium Oxide<\/td>SrO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Strontium Titanate<\/td>SrTiO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tantalum Oxide<\/td>Ta<\/sup>
2<\/sub><\/span>O<\/sup>
5<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tin Oxide<\/td>SnO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Titanium Oxide<\/td>TiO<\/sup>
2<\/sub><\/span>, Ti<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tungsten Oxide<\/td>WO<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Yttrium Oxide<\/td>Y<\/sup>
2<\/sub><\/span>O<\/sup>
3<\/sub><\/span> <\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Zinc Oxide<\/td>ZnO<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Zirconium Oxide<\/td>ZrO<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Selenides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Cadmium Selenide<\/td>CdSe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.995%<\/td>\n<\/tr>\n
Lead Selenide<\/td>PbSe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.95%<\/td>\n<\/tr>\n
Molybdenum Selenide<\/td>MoSe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Niobium Selenide<\/td>NbSe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Tantalum Selenide<\/td>TaSe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.4%<\/td>\n<\/tr>\n
Tungsten Selenide<\/td>WSe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Zinc Selenide<\/td>ZnSe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Silicides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Chromium Silicide<\/td>CrSi<\/sup>
2<\/sub><\/span>, Cr<\/sup>
3<\/sub><\/span>Si<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Cobalt Silicide<\/td>CiSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Hafnium Silicide<\/td>HfSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Iron Silicide<\/td>FeSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Molybdenum Silicide<\/td>MoSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Niobium Silicide<\/td>NbSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Tantalum Silicide<\/td>TaSi<\/sup>
2<\/sub><\/span>, TaSi<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Titanium Silicide<\/td>Ti<\/sup>
5<\/sub><\/span>Si<\/sup>
2<\/sub><\/span>, TaSi<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tungsten Silicide<\/td>WSi<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Vanadium Silicide<\/td>VSi<\/sup>
2<\/sub><\/span> , V<\/sup>
3<\/sub><\/span>Si<\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n
Zirconium Silicide<\/td>ZrSi 2<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.5%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Sulfides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Cadmium Sulfide<\/td>CdS<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Indium sulfide<\/td>In<\/sup>
2<\/sub><\/span>S<\/sup>
3<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Lead Sulfide <\/td>PbS<\/td>x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Molybdenum Sulfide<\/td>MoS<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99%<\/td>\n<\/tr>\n
Tantalum Sulfide<\/td>TaS<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Tungsten Sulfide<\/td>WS<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Zinc Sulfide<\/td>ZnS<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Zirconium Sulfide<\/td>ZrS<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div>
Tellurides<\/div><\/span>
[vc_column_text]\n\n\n\n\t\n\n\t\n\t\n\t\n\t\n\t\n\t\n\t\n\n\t
Material<\/th>Composition<\/th>Sputtering Target<\/th>Cylindrical Target<\/th>E-Beam<\/th>Evaporation<\/th>Typical Purity<\/th>\n<\/tr>\n<\/thead>\n
Cadmium Telluride<\/td>CdTe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Lead Telluride<\/td>PbTe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n
Molybdenum Telluride<\/td>MoTe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.9%<\/td>\n<\/tr>\n
Niobium Telluride<\/td>NbTe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Tantalum Telluride<\/td>TaTe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Tungsten Telluride<\/td>WTe<\/sup>
2<\/sub><\/span><\/td>		x<\/td><\/td>x<\/td>x<\/td>99.8%<\/td>\n<\/tr>\n
Zinc Telluride<\/td>ZnTe<\/td>x<\/td><\/td>x<\/td>x<\/td>99.99%<\/td>\n<\/tr>\n<\/tbody>\n
REQUEST FOR QUOTE<\/a><\/th>\n<\/tr>\n<\/tfoot>\n<\/table>\n[\/vc_column_text]<\/div><\/div><\/div><\/div>[\/vc_column][\/vc_row]<\/p>\n<\/div>","protected":false},"excerpt":{"rendered":"

[vc_row][vc_column][vc_custom_heading text=”SPUTTERING TARGET MATERIALS” font_container=”tag:h1|text_align:center” google_fonts=”font_family:Open%20Sans%3A300%2C300italic%2Cregular%2Citalic%2C600%2C600italic%2C700%2C700italic%2C800%2C800italic|font_style:400%20regular%3A400%3Anormal” css=””][vc_separator color=”black” border_width=”5″ el_width=”10″][vc_column_text css=””]Choosing … <\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"inline_featured_image":false,"footnotes":""},"class_list":["post-715","page","type-page","status-publish","hentry"],"yoast_head":"\nSputtering Target Materials available from Process Materials Inc.<\/title>\n<meta name=\"description\" content=\"Choosing the proper sputtering target materials is as important as choosing the form. 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