Backing Plates

We offer a complete line of backing plates to support all commercial sputtering systems as well as custom designed backing plates to satisfy each customer's particular requirements. Typically , most materials require high thermal and electrical conductivity. Thus, OFHC copper is generally, used. Depending on each client's specifications, other materials such as titanium, molybdenum, stainless steel or aluminum are available. CAD/CAM engineering is used in the development of custom-designed backing plates. Numerically controlled equipment is used on all products.

Rotatable Backing Tubes

Backing tubes are available in aluminum, copper, stainless steel, niobium, zirconium, and titanium. Backing tubes are available for all commercial rotatable systems up to 216" length. Thorough specifications are detailed toward inside and outside diameters, wall thickness, concentricity and sealing surfaces.