Material
Composition |
TYPICAL PURITY |
TARGETS |
EVAP. MATERIAL |
E-BEAM STARTER SOURCE |
SUGGESTED APPLICATIONS/
APPLICATION NOTES |
Aluminum-
Chromium
(AL) x (Cr)1-x
|
99.99%
|
X
|
X
|
X
|
|
Aluminum-
Cobalt
(Al) x (Co)1-x
|
99.95%
|
X
|
X
|
X
|
|
Aluminum-
Copper
(Al) x (Cu)1-x
|
99.99%
|
X
|
X
|
X
|
Conductor contacts in microcircuits.
|
Aluminum
-Iron
(Al) x(Fe)1-x
|
99.99%
|
X
|
X
|
X
|
|
Aluminum-
Silicone
(Al) x (Si)1-x
|
99.9%-
99.9999%
|
X
|
X
|
X
|
Conductor contacts in microcircuits.
|
Aluminum-
Silicon-
Copper
(Al)x(Si)y(Cu)z
|
99.9%-
99.9999%
|
X
|
X
|
X
|
Conductor contacts in microcircuits.
|
Aluminum-
Titanium
(Al)50(Ti)50
|
99.95%
|
X
|
X
|
X
|
|
Chromium-
Silicon-
Monoxide
(Al)x(SiO)1-x
|
99.9%
|
X
|
X
|
X
|
Excellent thin film resistors for
integrated circuits.
|
Chromium-
Nickel
(Cr)x(Ni)1-x
|
99.9%
|
X
|
X
|
X
|
|
Chromium
-Cobalt
(Cr)x(Co)1-x
|
99.95%
|
X
|
X
|
X
|
|
Chromium-
Cobalt-
Nickel
(Cr)x(Co)y(Ni)z
|
99.95%
|
X
|
X
|
X
|
|
Cobalt-
Nickel
(Co)x(Ni)1-x
|
99.95%
|
X
|
X
|
X
|
Magnetic films.
|
Iron-Nickel
(Permalloy)
(Fe)19(Ni)81
|
99.9%
|
X
|
X
|
X
|
|
Indium-Tin
(In)x(Sn)
|
99.99%-
99.999%
|
X
|
X
|
X
|
Oxidizes to give transparent, conductive
films.
|
Nickel-
Vanadium
(Ni)93(V)07
|
99.999%
|
X
|
X
|
X
|
Used in circuits, vanadium renders
nickel non-magnetic.
|
Titanium-
Tungsten*
(na less than 50PPB)
|
99.9%
99.995%
|
X
|
X
|
X
|
Diffusion barriers, primarily
between
Pt. silicide contacts and other interconnects.
|
